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发明名称
摘要
申请公布号	JP4719699(B2)	申请公布日期	2011.07.06
申请号	JP20070029942	申请日期	2007.02.09
申请人		发明人
分类号	H01J37/21;H01J37/145;H01J37/244;H01J37/28;H01L21/66	主分类号	H01J37/21
代理机构		代理人
主权项
地址

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