| 发明名称 |
Piezo-resistive MEMS resonator |
| 摘要 |
<p>A piezo-resistive MEMS resonator comprising an anchor (12), a resonator (10) mounted on the anchor, an actuator (16) mounted to apply an electrostatic force on the resonator and a piezo-resistive read-out means comprising a nanowire (18) coupled to the resonator.</p> |
| 申请公布号 |
EP2341618(A1) |
申请公布日期 |
2011.07.06 |
| 申请号 |
EP20090180585 |
申请日期 |
2009.12.23 |
| 申请人 |
NXP B.V. |
发明人 |
KOOPS, GERHARD;VAN BEEK, JOZEF THOMAS MARTINUS |
| 分类号 |
H03H9/02;H03H3/007 |
主分类号 |
H03H9/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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