METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY
摘要
申请公布号
EP1867218(A4)
申请公布日期
2011.07.06
申请号
EP20060720851
申请日期
2006.02.17
申请人
CYMER, INC. (A NEVADA CORPORATION)
发明人
ALGOTS, JOHN MARTIN;FOMENKOV, IGOR V.;ERSHOV, ALEXANDER I.;PARTLO, WILLIAM N.;SANDSTROM, RICHARD L.;HEMBERG, OSCAR;BYKANOV, ALEXANDER N.;COBB, DENNIS W.
