EXPOSURE APPARATUS AND METHOD OF CHANGING MASK IN THE EXPOSURE APPARATUS

摘要

PURPOSE: An exposure apparatus and a method for exchanging a mask of an exposure apparatus are provided to improve operating efficiency of equipment by largely shortening a time for exchanging a mask. CONSTITUTION: An exposure body comprises a light source unit(110), a buffer unit(130) arranged on a light irradiation path for transferring a pattern mask, and a buffer unit(130) for temporarily receiving the pattern mask transferred from the stage unit. The pattern mask to be exchanged is stored in a mask library unit(200). An exposure apparatus transfers the pattern mask to the stage unit. The exposure apparatus includes a robot unit for transferring the pattern mask to the mask library unit.