| 摘要 |
PURPOSE: A heating pipe for ventilation is provided to prevent a precipitation phenomenon of gas state byproduct included in a feeding gas by heating the gas, exhausted after a semiconductor process, at a high temperature. CONSTITUTION: An exhaust unit of a facility exhausts a gas used in a semiconductor process. A metal pipe(20) is connected between inlet ports of an exhaust duct. The metal pipe offers a path in which the gas is transmitted while being heated. A teflon integrated type flange(12) has a configuration in which the flange ring is combined in both ends of a teflon tube. A mineral insulated cable, which is a heating wire, is wound in a spring type for being closely contacted to an external side of the pipe.
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