Metrology and registration system and method for laminography and tomography

摘要

A metrology system that uses an imaging system to monitor alignment features on the sample or sample holder of an X-ray laminography or tomography system. the metrology system has the capability to provide both sample shift and sample rotation movement data to a data acquisition system. These shift and rotation data can be used in alignment routines to produce 3D reconstructions from the X-ray images/projections. The metrology system is based on an imaging and focusing measurement of intrinsic feature of the sample or artificial features fabricated on the sample or sample holder.