发明名称 Vacuum hermetic organic packaging carrier and sensor device package
摘要 A vacuum hermetic organic packaging carrier and a sensor device package are provided. The organic packaging carrier includes an organic substrate, a conductive circuit layer, and an inorganic hermetic insulation film. The organic substrate has a first surface. The conductive circuit layer is located on the first surface and exposes a portion of the first surface. The inorganic hermetic insulation film at least covers the exposed first surface to achieve an effect of completely hermetically sealing the organic packaging carrier.
申请公布号 US7973454(B1) 申请公布日期 2011.07.05
申请号 US20100850643 申请日期 2010.08.05
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 CHEN LUNG-TAI;HO TZONG-CHE;PAN LI-CHI;FAN YU-WEN
分类号 H01L41/053 主分类号 H01L41/053
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