发明名称 Microresonator systems and methods of fabricating the same
摘要 Various embodiments of the present invention are related to microresonator systems and to methods for fabricating the microresonator systems. In one embodiment, a method of fabricating a microresonator system comprises: forming a multilayer system having a bottom layer, a top layer, and an intermediate layer having one or more quantum wells and sandwiched between the bottom layer and the top layer; embedding at least one waveguide in a substrate having a top surface, the at least one waveguide positioned adjacent to the top surface of the substrate; wafer bonding the top layer of the multilayer system to the top surface of the substrate; forming a microresonator in the multilayer system, wherein at least a portion of a peripheral annular region of the microresonator is portioned above the at least one waveguide; and forming a current isolation region in at least a portion of a central region of the microresonator.
申请公布号 US7972882(B2) 申请公布日期 2011.07.05
申请号 US20090479604 申请日期 2009.06.05
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. 发明人 TAN MICHAEL RENNE TY;WANG SHIH-YUAN;STEWART DUNCAN;FATTAL DAVID A.
分类号 H01L21/00 主分类号 H01L21/00
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