发明名称 Semiconductor device and method for fabricating the same
摘要 Embodiments relate to a semiconductor device and a method for fabricating the same. According to embodiments, a semiconductor device may include a metal film spaced from a semiconductor substrate at a predetermined interval and in which a plurality of etching holes are formed. A bottom metal pattern disposed on and/or over a space between the semiconductor substrate and metal film and top metal pattern formed on and/or over the bottom metal pattern may be provided. A pillar may be formed on and/or over the semiconductor substrate and may support one side of a low surface of the bottom metal pattern. A pad may be formed on and/or over the semiconductor substrate, and an air layer corresponding to the bottom metal pattern may be inserted therein. According to embodiments, a pyro-electric switch transistor using a bi-metal with different coefficients of thermal expansion may be provided.
申请公布号 US7973374(B2) 申请公布日期 2011.07.05
申请号 US20080330666 申请日期 2008.12.09
申请人 DONGBU HITEK CO., LTD. 发明人 JEONG EUN-SOO
分类号 H01L29/84 主分类号 H01L29/84
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