发明名称 Rectangular parallelepiped fluid storage and dispensing vessel
摘要 A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
申请公布号 US7972421(B2) 申请公布日期 2011.07.05
申请号 US20090401325 申请日期 2009.03.10
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 BRESTOVANSKY DENNIS;WODJENSKI MICHAEL J.;ARNO JOSE I.;CARRUTHERS J. DONALD;MOROCO PHILLIP A.
分类号 B01D53/04;B01D;B01D53/02;B01D59/26;B67D7/74;B67D99/00;F17C11/00 主分类号 B01D53/04
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