发明名称 BONDING PAD OF SEMICONDUCTOR CHIP FOR REDUCING DESTROYMENT
摘要 PURPOSE: A bonding pad of a semiconductor chip reducing the damage possibility is provided to reduce the possibility of damage when wire bonding is performed by setting a bonding preservation region in a circle or a round ring. CONSTITUTION: The first metal wiring layer(220) is formed on an upper part of the silicon substrate. The second metal wiring layer(230) is formed on upper part of the first metal wiring layer. The second metal wiring layer's one part is exposed for the wire bonding and a bonding pad area is formed. An inter-layer insulating film(240) is formed between the first metal wiring layer and the second metal wiring layer.
申请公布号 KR101046673(B1) 申请公布日期 2011.07.05
申请号 KR20100006265 申请日期 2010.01.25
申请人 TLI INC. 发明人 HAN, CHANG HEE;KIM, SEUNG GON;SHIM, JU HYUN;YOON, JIN SIK
分类号 H01L21/60;H01L21/3205 主分类号 H01L21/60
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