发明名称 |
Method and apparatus for treating exhaust gas |
摘要 |
An apparatus for treating an exhaust gas that includes a pre-treatment section that removes a powdery component, a water-soluble component or a hydrolytic component from the exhaust gas. The exhaust gas contains a fluorine compound and CO. A heating oxidative decomposing section performs heating oxidative decomposition of at least one of the fluorine compound and CO to detoxify the exhaust gas. The apparatus also has a post-treatment section for post-treating an acid gas such as HF which has been produced by the heating oxidative decomposition.
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申请公布号 |
US7972582(B2) |
申请公布日期 |
2011.07.05 |
申请号 |
US20040482683 |
申请日期 |
2004.05.13 |
申请人 |
EBARA CORPORATION |
发明人 |
SHINOHARA TOYOJI;MORI YOICHI;SUZUKI YASUHIKO;AONO HIROSHI;SHIRAO YUJI |
分类号 |
B01D53/00;B01D53/14;B01D53/34;B01D53/62;B01D53/68;B01D53/70;B01D53/86;B01D53/92;B01D53/94;F23G7/06;F23J15/00;F23J15/08 |
主分类号 |
B01D53/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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