METHOD FOR TRANSPARENT CONTACTS OF SOLAR CELL

摘要

PURPOSE: A method for manufacturing a transparent electrode for a solar cell is provided to make a dual electrode structure by using DC sputtering instead of RF sputtering manufacturing method. CONSTITUTION: A back side electrode(200) is formed on the substrate(100). An absorbing layer(300) is formed on the back side electrode. A transparent electrode(500) is formed on the buffer layer(400). The substrate in which the back side electrode, the absorption layer and the buffer layer are formed is inputted into a DC sputtering vacuum chamber whose AZO target is prepared. A low conductive ZnO layer(510) is formed on an upper side of the buffer layer under ambient gas including oxygen gas and argon gas. An AZO layer(520) is formed on an upper layer of the low conductive ZnO layer by injecting inert gas into the ambient gas residually remaining in the DC sputtering chamber.