SUBSTRATE FOR LIQUID EJECTION HEAD, LIQUID EJECTION HEAD, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To solve a problem wherein there is a possibility that an insulating layer is dissolved when the insulating layer is provided to protect energy generating elements. SOLUTION: A first protective layer made of metal is provided on the insulating layer 10 facing a substrate 40 for a liquid ejection head including elements 12 used for ejecting liquid, and a supply port penetrating the insulating layer 10 and a substrate 8, and a second protective layer made of metal is provided on a surface of the supply port to which the substrate is exposed. COPYRIGHT: (C)2011,JPO&INPIT