| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device that achieves stable positioning without being affected by noise even when a positioning stage is located at a far distance from controller as compared with the conventional positioning controller, and it is prone to noise. SOLUTION: When a difference between the current position value of a positioning stage detected by a positioning sensor of a digital output and the previous position value of the positioning stage detected by the positioning sensor of a digital output in the previous control cycle is within a set value, the current value is employed in a positioning operation. When the difference is larger than the set value, the previous value is employed in positioning operation. COPYRIGHT: (C)2011,JPO&INPIT |
