| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve optical characteristics of a gas cooled type YAG laser oscillation device by controlling the temperature in a chamber. <P>SOLUTION: The YAG laser oscillation device includes a laser oscillator 10, a gas supply and discharge device 62, a temperature control means 70, and a stress absorbing means 80. The laser oscillator 10 includes a chamber 36 accommodating a YAG rod 30 etc., an output mirror 40, etc., in a housing 12. The stress absorbing means 80 is arranged in contact with the internal surface of an opening/closing portion 16 provided to the housing 12 and the external surface of the chamber 36 in a state wherein the opening/closing portion 16 is closed so as to absorb force received from the opening/closing portion 16. The temperature control means 70 includes a temperature sensor 72 configured to measure the temperature of the chamber 36, a Peltier unit 74 fitted to the opening/closing portion 16 to generate or absorb heat, and a temperature control portion 76 configured to control the heat generation or absorption of the Peltier unit 74. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
