| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate capable of reducing deflection of substrate material due to own weight, and to provide a method of manufacturing the substrate. SOLUTION: A film that reduces the deflection of substrate material due to own weight and has a thermal expansion coefficient larger than the thermal expansion coefficient of the substrate material is formed on one surface 1a of the substrate material which produces the deflection due to own weight when a peripheral part 1b is supported. COPYRIGHT: (C)2011,JPO&INPIT
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