IMPRINT APPARATUS AND METHOD, AND METHOD OF MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide an imprint apparatus advantageous in usage cost. SOLUTION: The imprint apparatus is provided which performs processing including the application of resin to an imprint region on a substrate and the molding by the applied resin die. The apparatus includes an applying means having a discharge part including a plurality of discharge ports to discharge the resin to apply the resin to the imprint region and a control means for controlling the applying means so as to change over the ranges of the discharge ports to discharge the resin during the processing with respect to a plurality of imprint regions with the same size. COPYRIGHT: (C)2011,JPO&INPIT