发明名称 IN-SITU DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY PLASMA SPRAYING
摘要 A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity
申请公布号 WO2011028527(A3) 申请公布日期 2011.06.30
申请号 WO2010US46498 申请日期 2010.08.24
申请人 APPLIED MATERIALS, INC.;SHANG, QUANYUAN;YANG, LU;BROWN, KARL M.;OLGADO, DONALD J., K.;PEBENITO, VICTOR;BOLANDI, HOOMAN;ISHIKAWA, TETSUYA;BACHRACH, ROBERT Z.;CHEN, LIANG-YUH 发明人 SHANG, QUANYUAN;YANG, LU;BROWN, KARL M.;OLGADO, DONALD J., K.;PEBENITO, VICTOR;BOLANDI, HOOMAN;ISHIKAWA, TETSUYA;BACHRACH, ROBERT Z.;CHEN, LIANG-YUH
分类号 C23C4/12;B05D1/04;B05D3/00;B05D7/14;C23C4/04;C23C4/18 主分类号 C23C4/12
代理机构 代理人
主权项
地址