| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit position control method and its device of a monochromator enabled to carry out adjustment of a monochromator in a short time, in the slit position control device of a monochromator. SOLUTION: The monochromator including an energy filter for generating energy dispersion by receiving incident charged particle beams, and extracting electron beams with a desired energy width through energy selecting slits fitted on an energy dispersion surface, is structured having a current detection means 4 for detecting a current flowing in the energy selecting slits 22, and a slit position control means 5 for controlling a position of the energy selecting slits 22 so as to have the current value detected by the current detection means 4 minimum. COPYRIGHT: (C)2011,JPO&INPIT |
