| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro having a plurality of detection axes with sensitivity on an angular velocity around its z-axis kept from lowering while reducing sensitivity in other axial directions, and excelling in mass productivity. <P>SOLUTION: This vibration gyro including a vibrator formed by boring a Z-axial through hole through a flat plate paralleling an XY plane and capable of detecting an angular velocity around its Y and Z axes includes a first drive means, a first detection means, and a second detection means. The first drive means comprises a first vibrator 21 comprising a first arm 3b, a first link 4b, and second arms 5c and 5d. The first arm 3b has its longitudinal direction in the Y axis direction. The first link 4b is connected to one end of the first arm 3b and has a shape symmetric about the central axis of the first arm 3b. One end of each of the second arms 5c and 5d is connected to each of X-axial both ends of the first link 4b and has its longitudinal direction in the Y axis direction. The first drive means causes the second arms to bendingly vibrate in the X axis direction. X-axial bending vibration of the first arm is detected by the first detection means while Z-axial bending vibration of the second arm is detected by the second detection means. The maximum displacement amount of vibration arising in the first link 4b is equal to or less than 10% as compared with the maximum displacement amount of the bending vibration arising in the second arm. <P>COPYRIGHT: (C)2011,JPO&INPIT |
