发明名称 DOUBLE CONTAINMENT SYSTEM FOR TRANSPORTING FLUID THROUGH ROLLING LOOP-LIKE CABLE DUCT
摘要 <P>PROBLEM TO BE SOLVED: To provide a double containment tube capable of safely transporting hydrogen gas or the like, and a fluid transport system. <P>SOLUTION: This fluid transport system includes a first flexible tube 305 having an inner wall and a second flexible tube 310 having an outer wall. The second tube is arranged inside the first tube, and a separation member 315 is arranged between the inner wall of the first tube and the outer wall of the second tube. The first flexible tube is formed to transport a first fluid, and the second flexible tube is formed to transport a second fluid. The first and second flexible tubes are formed so that the first fluid isolates the second fluid from a surrounding environment, and the first fluid can be monitored to detect leakage. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011129905(A) 申请公布日期 2011.06.30
申请号 JP20100271351 申请日期 2010.12.06
申请人 ASML HOLDING NV 发明人 DANIEL PAUL RODAK
分类号 H01L21/027 主分类号 H01L21/027
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