| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam drawing device for efficiently and accurately detecting and correcting displacement of a beam axis, and a method of correcting displacement of a beam axis of a charged particle beam. <P>SOLUTION: This charged particle beam drawing device 1 includes: an electron gun 2 for emitting an electron beam; and an aligner 14, a blanking electrode 6, a deflector 7 and a first shaping aperture 11 which are sequentially arranged in the downstream direction of the beam axis of the electron beam 15. A displacement detection electrode 13 is formed on the first shaping aperture 11. The blanking electrode 6 and the deflector 7 are driven to control the orbit of the electron beam 15, and the displacement detection electrode 13 is irradiated with the electron beam 15. Information related to the displacement of the beam axis of the electron beam is obtained from the quantity of current flowing into respective electrode parts constituting the displacement detection electrode 13. The information is fed back to the aligner 14 to correct the beam axis of the electron beam. <P>COPYRIGHT: (C)2011,JPO&INPIT |
