| 摘要 |
PROBLEM TO BE SOLVED: To provide a DLTS measuring electrode in which false peak does not appear when performing measurement. SOLUTION: The DLTS measuring electrode includes: a schottky electrode 12a which is provided on a silicon substrate and is made of antimony; and an adhesion film 12b which is provided between a surface 10a of a silicon substrate 10 and the schottky electrode 12a and is made of titanium. Antimony is used as a material of the schottky electrode, so that false peak hardly appears in DLTS measurement. Moreover, it becomes possible to suppress a leakage current in measurement. Accordingly, it becomes possible to evaluate type and concentration of heavy metal contained in a silicon wafer with precision and high sensitivity. COPYRIGHT: (C)2011,JPO&INPIT |
