| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate with a transparent conductive film wherein a base layer and a transparent conductive film are formed on the substrate in this order, and a photoelectric conversion device having high conversion efficiency. <P>SOLUTION: In the substrate with a transparent conductive film, the transparent conductive film is constituted with a plurality of transparent electrode layers formed by a chemical vapor deposition method. When forming the plurality of transparent electrode layers, a next layer is formed after stopping film deposition by vacuum-exhausting a film deposition chamber after making film deposition of each layer when continuously forming under a pressure-reduced atmosphere. Or, after once stopping the film deposition by taking out the substrate under atmospheric pressure, the next layer is film-deposited under the pressure-reduced atmosphere by again supplying to the film-deposition chamber. A new crystal nucleus is generated on a texture formed by once stopping crystal growth, and the most suitable surface unevenness shape for a thin-film photoelectric conversion device can be formed by forming a new texture from the new crystal nucleus on the basis of these methods. Consequently, the thin-film photoelectric conversion device which can restrain reduction of voltage and a curvilinear factor while retaining short-circuit current density and has high power generation efficiency can be attained. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
