| 摘要 |
PROBLEM TO BE SOLVED: To provide an in-line film forming apparatus capable of suppressing generation of vibrations accompanying an open/close operation of a gate valve and opening and closing the gate valve at a high speed. SOLUTION: Just before a piston 114 in a cylinder 115 reaches an end in one direction, a second valve 117a is fully closed to discharge air through only a second flow rate control valve 117b; and just before the piston 114 in the cylinder 115 reaches an end in the other direction, a first valve 116a is fully closed to discharge air through only a first flow rate control valve 116b. Thereby, shocks due to the contact between the end of the cylinder 115 and the piston 114 are reduced, and generation of vibrations can be suppressed. COPYRIGHT: (C)2011,JPO&INPIT
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