| 摘要 |
A non-contact holder holds the workpiece on the holding surface without contact between the workpiece and the holding surface by generating a negative pressure at the opening using a circular flow of gas introduced into the inside of the column body and generating a positive pressure between the holding surface and the workpiece using the gas flowing from the opening provided on the holding surface, and the holding surface has (2n+1) (n: a positive integer) guide grooves which have spiral shapes extending in spiral directions in correspondence with the circulation direction of the circular flow and have starting ends communicating with the opening to guide the gas introduced through the starting ends in the spiral directions, the final ends of the guide grooves being disposed at equal intervals on the circumference of the holding surface around the opening.
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