发明名称 MICROWAVE SUPPLYING APPARATUS AND MICROWAVE PLASMA SYSTEM
摘要 The invention discloses a microwave supplying apparatus including a microwave generator, a first power divider, a second power divider, a first waveguide, and a second wave guide. The first waveguide is connected to the microwave generator and has a first output terminal and a second output terminal to divide a microwave generated by the microwave generator along a first direction. The second power divider is connected to the first output terminal and has a third output terminal and a fourth output terminal to divide the microwave along a second direction. The first waveguide and the second waveguide are connected to the third output terminal and the fourth terminal respectively and receive the microwave through the first power divider and the second power divider to respectively output the microwave fields with approximate intensity distributions.
申请公布号 US2011156838(A1) 申请公布日期 2011.06.30
申请号 US20090646981 申请日期 2009.12.24
申请人 HUANG CHUNG-CHUN;CHANG TSUN-HSU;LIN BO-HUNG;HU CHI-WEN 发明人 HUANG CHUNG-CHUN;CHANG TSUN-HSU;LIN BO-HUNG;HU CHI-WEN
分类号 H01P5/12 主分类号 H01P5/12
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