发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 In a semiconductor device using a nonvolatile memory, high speed erasing operation and low power consumption are realized. In a nonvolatile memory in which a channel formation region, a tunnel insulating film, and a floating gate are stacked in this order, the channel formation region is formed using an oxide semiconductor layer. In addition, a metal wiring for erasing is provided in a lower side of the channel formation region so as to face the floating gate. With the above structure, when erasing operation is performed, charge accumulated in the floating gate is extracted to the metal wiring through the channel formation region. Consequently, high speed erasing operation and low power consumption of the semiconductor device can be realized.
申请公布号 US2011156023(A1) 申请公布日期 2011.06.30
申请号 US20100974254 申请日期 2010.12.21
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 IEDA YOSHINORI
分类号 H01L29/788;H01L21/336;H01L29/24 主分类号 H01L29/788
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