发明名称 SEMICONDUCTOR COMPONENT AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor component includes: a semiconductor substrate; and a semiconductor device provided thereon, the device being a field-effect transistor that includes: a gate insulating film provided on the substrate; a gate electrode provided via the film; and a pair of source-drain regions provided to sandwich the electrode, the substrate including a patterned surface in a portion where the electrode is provided, the patterned surface of the substrate including a raised portion where the film is formed to cover a surface that lies on the same plane as a surface of the pair of source-drain regions, and the electrode is formed on a top surface of the film, and the patterned surface of the substrate including a recessed portion where the film is formed to cover surfaces of a groove formed toward the interior than the surface of the pair of source-drain regions, and the electrode is formed so as to fill the groove provided with the film.
申请公布号 US2011156136(A1) 申请公布日期 2011.06.30
申请号 US20100967857 申请日期 2010.12.14
申请人 SONY CORPORATION 发明人 AMARI KOICHI
分类号 H01L29/772;H01L21/336 主分类号 H01L29/772
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