发明名称 MANUFACTURING CROSS-STRUCTURES OF NANOSTRUCTURES
摘要 Techniques for manufacturing cross-structures of nanostructures, such as nanowires and carbon nanotubes are provided. In one embodiment, a method for manufacturing cross-structures of nanostructures include providing a substrate, patterning a first mask layer on the substrate, adsorbing first nanostructures onto surface regions of the substrate where the first mask layer does not exist, removing the first mask layer from the substrate, patterning a second mask layer on the substrate to which the first nanostructures are adsorbed, and adsorbing second nanostructures onto the surface regions of the substrate where the second mask layer does not exist, under conditions effective to manufacture cross-structures of nanostructures on the substrate.
申请公布号 KR101045128(B1) 申请公布日期 2011.06.30
申请号 KR20080075897 申请日期 2008.08.04
申请人 发明人
分类号 B82B1/00;B82B3/00;B82Y30/00;H01L29/775 主分类号 B82B1/00
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