| 摘要 |
PROBLEM TO BE SOLVED: To shorten operating time with high operating efficiency by enabling to precisely and automatically image a preset area in a specified condition. SOLUTION: The scanning electron microscope 10 is provided with a driving control portion 50 for driving an electron-optical system 30 and a sample stage 40 and an automatic imaging device 60. The automatic imaging device 60 is provided with an image specifying module 61 carrying out specifying of one or a plurality of imaging areas inside a current visual field picture area and setting of imaging conditions of a specified area, a storage module 62 storing position information, imaging conditions and visual field pictures of the imaging area specified, a superposing display 63 for displaying pictures displaying the current imaging area and pictures displaying imaging conditions superposed on the current visual field pictures, and a position adjustment module 64 for comparing the current imaging picture imaged on the basis of the position information inputted with the current visual field picture stored and for outputting a corrected imaging position from a volume of positional shift of the both pictures, and obtains a final imaging picture at the corrected imaging position found by the position adjustment module on the basis of the imaging conditions stored. COPYRIGHT: (C)2011,JPO&INPIT
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