| 摘要 |
PROBLEM TO BE SOLVED: To prevent picture quality from deteriorating by suppressing deterioration in dark current and an increase of fine white flaws even when an HDP film having excellent burying properties between wiring lines made fine is used as an interlayer insulating film. SOLUTION: Deposition temperatures of the HDP films 16 and 18 as interlayer insulating films are controlled to ≤365°C, preferably to the temperature range of 335 to 365°C, or more preferably to 350°C, and the deterioration in dark current and the increase in fine white flaws can be thereby suppressed to prevent the picture quality from deteriorating. COPYRIGHT: (C)2011,JPO&INPIT
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