发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 An insulating cover film is formed over at least a portion of a gate electrode in the direction of the channel width. A diffusion layer is formed to a portion of a substrate situating at a device forming region, thereby forming a source and a drain of a transistor. An insulating layer is formed over the device forming region, over the gate electrode, and over the insulating cover film. A contact is formed to the insulating layer and connected to the diffusion layer. A silicide layer is formed over the gate electrode. A side wall is formed higher than the gate electrode in a region in which the insulating cover film is formed. Then, the contact faces a region of the gate electrode in which the insulating cover film is formed.
申请公布号 US2011156108(A1) 申请公布日期 2011.06.30
申请号 US20100978889 申请日期 2010.12.27
申请人 RENESAS ELECTRONICS CORPORATION 发明人 MURAMATSU SATORU
分类号 H01L29/78 主分类号 H01L29/78
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