| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus and an object storage apparatus which can omit the remote conveyance of objects on the treatment of the objects in the storage apparatus, and can achieve the shortage of time and the simplification of operations and mechanisms on the delivery of the objects. SOLUTION: The treatment apparatus 15 and the object storage apparatus 13 include the treatment apparatus used for treating the objects and having a movable stage 2 for setting the objects to be treated, and a treatment unit 144 equipped with a robot arm 4 disposed at the stage 2, and the object storage apparatus 13 used for storing the objects and for delivering the objects between the object storage apparatus 13 and the stage of the treatment apparatus, and having a conveyance container 1 for storing the objects, and a stocker 13a used for storing the objects together with the conveyance container 1 and having a guide member 10 capable of being slid to a delivery position on the stage. COPYRIGHT: (C)2011,JPO&INPIT
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