| 摘要 |
The invention relates to a loading apparatus for an ALD reactor, the ALD reactor comprising a vacuum chamber (2) having a first end wall (6) and a second end wall (20), which comprises a rear flange, and side walls/casing (22) connecting the first and the second end wall, and a reaction chamber (4) provided inside the vacuum chamber (2). According to the invention, the loading apparatus is provided in the side wall/casing (22) of the vacuum chamber (2), in which case one or more substrates (10) may be introduced into the reaction chamber (4) and removed therefrom through the side wall (22) of the vacuum chamber (2). |
