GAS BARRIER POLYIMIDE FILM AND METAL LAMINATE USING SAME

摘要

PURPOSE: A gas barrier polyimide film is provided to be used in a pine pitch circuit demanding high size accuracy. CONSTITUTION: A gas barrier polyimide film has 4GPa or more elasticity, 0-22 ppm/°C of linear expansion coefficient at 50-200°C, and 0.05% or less of heat shrinkage rate. One side of the polyimide film comprises a SiO_2 layer. The oxygen transmittance is 5.0×10 to (-15) mol/m^2·s·Pa or less. The thickness of polyimide film is 100-500 angstrom.