Vacuum coating system and method for operating a vacuum coating system,申请号AU20090336876-传众专利搜索

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发明名称	Vacuum coating system and method for operating a vacuum coating system
摘要
申请公布号	AU2009336876(A1)	申请公布日期	2011.06.30
申请号	AU20090336876	申请日期	2009.12.09
申请人	SOVELLO AG	发明人	WILLERS, GUIDO
分类号	C23C14/56;H01L21/00	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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