| 摘要 |
PROBLEM TO BE SOLVED: To prevent a minute region to be processed or to be observed from contamination or frost deposition by quick cooling. SOLUTION: Gas or liquid is directly sprayed on a sample so that the minute region to be processed or to be observed is quickly cooled. By switching irradiating quantities and irradiating positions of the refrigerant, contamination or frost deposition on the sample is able to be prevented. Even under cooling conditions, sample contamination or frost deposition can be prevented. With this, a protective film forming on the sample, for example, is effectively performed under cooling conditions. COPYRIGHT: (C)2011,JPO&INPIT |
