METHOD FOR MEASURING CHARACTERISTIC OF OBJECT TO BE MEASURED, AND MEASURING DEVICE

摘要

Disclosed is a measuring method for measuring the characteristic of an object to be measured by holding the object to be measured on a void-disposed structure (1) having at least two void parts (11) pierced in the direction perpendicular to the principal surface thereof, irradiating the void-disposed structure (1) on which the object to be measured is held with electromagnetic waves, and detecting the frequency characteristic of an electromagnetic wave transmitted through the void-disposed structure (1). The void-disposed structure (1) has a lattice-shaped structure in which the void parts (11) are periodically arranged in at least one direction on the principal surface of the void-disposed structure (1). As the frequency characteristic, a first frequency characteristic and a second frequency characteristic are detected. In the first frequency characteristic, a dip waveform appears. In the second frequency characteristic, the dip waveform does not appear, or a dip waveform having a depth smaller than that of the dip waveform in the first frequency characteristic appears. On the basis of the relation between the first frequency characteristic and the second frequency characteristic, the characteristic of the object to be measured is measured.