| 摘要 |
PROBLEM TO BE SOLVED: To operate a hot cathode ionization vacuum gauge during a degassing operation by an electron bombardment method and a current heating method, by controlling degassing power level as a function of gauge pressure. SOLUTION: While the degassing power level is increased, the rate of change of gauge pressure is monitored. When the gauge pressure is decided as having the possibility of exceeding the upper pressure limit of the gauge pressure, by the monitoring change rate of the gauge pressure, the increase of the degassing power is stopped or the degassing power is decreased. Additionally, this operation is to be continued until a predetermined final degassing condition is satisfied. A display is activated, after the successful completion of the degassing operation. COPYRIGHT: (C)2011,JPO&INPIT
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