RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND CONTAINED THEREIN

摘要

A radiation-sensitive resin composition comprising: a compound (A) represented by general formula (A) (wherein R1 and R2 independently represent a substituted or unsubstituted univalent hydrocarbon group having 1 to 25 carbon atoms; X and Z independently represent a substituted or unsubstituted bivalent hydrocarbon group having 1 to 25 carbon atoms; Y represents a single bond or the like; and n represents an integer of 0 to 5); a solvent (B); and a resin (C) having an acid-labile group.