发明名称 LIGHT RECEIVING ELEMENT AND OPTICAL INTERCONNECTION LSI
摘要 <P>PROBLEM TO BE SOLVED: To improve high-speed responsiveness without reducing a transmitted light volume of surface plasmon in an aperture for transmitting the surface plasmon. <P>SOLUTION: A light receiving element includes a conductive thin film 21 on one face of which a coupling periodic structure 22 to convert incident light into the surface plasmon is disposed, the aperture 23 penetrating the opposite faces being disposed in the coupling periodic structure 22, and a light receiving unit disposed at the end of the other face opposite to the one face of the aperture 23 on which the coupling periodic structure 22 is disposed. The shape of the aperture 23 is a crisscross formed by two orthogonally-crossed slits, wherein a long side length of each slit is longer than 1/2 of a surface plasmon wavelength, and its short side length is shorter than 1/2 of the surface plasmon wavelength. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011128162(A) 申请公布日期 2011.06.30
申请号 JP20110011904 申请日期 2011.01.24
申请人 TOSHIBA CORP 发明人 FURUYAMA HIDETO
分类号 G01J1/04;G01J1/02;H01L31/0248;H01L31/108 主分类号 G01J1/04
代理机构 代理人
主权项
地址