| 摘要 |
PROBLEM TO BE SOLVED: To securely fix a workpiece such as a quartz glass plate to a surface plate, and also easily peel that during machining such as grinding. SOLUTION: On a quartz glass surface plate cleaned by degreasing, a quarts glass plate which is a workpiece cleaned by degreasing is installed through ultraviolet curing epoxy resin. Ultraviolet ray with a wavelength of 365 nm generated from a high pressure mercury vapor lamp of 500 W is irradiated on that for 30 seconds, thereby securely bonding the quartz glass plate on the surface plate. After bonding, an opposite side surface to a bonding surface is subjected to grooving by using a diamond wheel. Then, grinding fluid on a surface is removed, and ultraviolet ray with a wavelength of 185 nm having the output of 100 W is irradiated on the bonding surface for 30 minutes, thereby peeling the surface plate and the quarts glass plate. COPYRIGHT: (C)2011,JPO&INPIT |
