摘要 |
A method of forming a memory array includes forming first and second strings of serially-coupled memory cells respectively on first and second sides of a conductive pillar. Forming the first string of memory cells includes forming a first control gate on the first side of the conductive pillar and interposing a first charge trap between the first side of the conductive pillar and the first control gate. Forming the second string of memory cells comprises forming a second control gate on the second side of the conductive pillar and interposing a second charge trap between the second side of the conductive pillar and the second control gate. The first and second charge traps are electrically isolated from each other, and the first and second control gates are electrically isolated from each other.
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