发明名称 MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM
摘要 The present invention provides a manufacturing method of a magnetic recording medium capable of reducing the deterioration of a recording layer and improving the Duty cycle of the recording layer. An embodiment of the present invention is a manufacturing method of a patterned recording medium such as BPM (Bit Patterned Media) and DTM (Discrete Track Media). The manufacturing method has a deposition step of depositing a resist protective film on a resist pattern formed on a workpiece containing a recording layer, and a recording layer processing step of processing the recording layer into a pattern shape by dry etching using the resist pattern and the resist protective film as a mask.
申请公布号 US2011155691(A1) 申请公布日期 2011.06.30
申请号 US20100974881 申请日期 2010.12.21
申请人 CANON ANELVA CORPORATION 发明人 XU GE
分类号 G11B5/84 主分类号 G11B5/84
代理机构 代理人
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