| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To accurately define a light-shielding part, a light-transmitting part and a phase shifter part. <P>SOLUTION: A method for producing an optical element is provided, the optical element including a light-shielding part formed by patterning a light-shielding film formed on a substrate, a light-transmitting part comprising an exposed part of the substrate surface, and a phase shifter part formed by partially etching the substrate surface. The method includes the steps of: preparing an optical element blank having a light-shielding film and a first resist film layered in this order on a substrate; and drawing a pattern and developing the first resist film to form a first resist pattern, which then covers a region where the light-shielding part is to be formed and defines a region where the phase shifter part is to be formed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
