发明名称 METHOD OF FORMING A HIGH DENSITY STRUCTURE
摘要 The invention relates to a method of forming a high density structure comprising the steps of providing a substrate (2) wherein the high density structure is to be formed with a release liner (3), said release liner being self-removable; forming at least one cavity (5a, 5b) in the substrate through the release liner, said at least one cavity forming at least a part of the high density structure; at least partially filling the at least one cavity with a filler material (7a, 7b); sintering the thus formed structure; removing the release liner from the substrate (2).
申请公布号 US2011159683(A1) 申请公布日期 2011.06.30
申请号 US200913054277 申请日期 2009.07.14
申请人 VAN DEN BRAND JEROEN;DIETZEL ANDREAS HEINRICH 发明人 VAN DEN BRAND JEROEN;DIETZEL ANDREAS HEINRICH
分类号 H01L21/768 主分类号 H01L21/768
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