Modular system and process for continuous deposition of a thin film layer on a substrate,申请号AU20100249140-传众专利搜索

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发明名称	Modular system and process for continuous deposition of a thin film layer on a substrate
摘要
申请公布号	AU2010249140(A1)	申请公布日期	2011.06.30
申请号	AU20100249140	申请日期	2010.12.02
申请人	PRIMESTAR SOLAR, INC.	发明人	PAVOL, MARK JEFFREY;BLACK, RUSSELL WELDON;MURPHY, BRIAN ROBERT;RATHWEG, CHRISTOPHER;LITTLE, EDWIN JACKSON;REED, MAX WILLIAM
分类号	C23C16/00;C23C16/448;H01L21/00;H01L31/18	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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