发明名称 METHOD OF GENERATING LOCALIZED PATTERN
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method of generating a simple and high-resolution localized pattern which is easy to implement. <P>SOLUTION: This method of generating at least one pattern on the upper surface of a support body 1 made of a substance showing first thermal conductivity includes a process of arranging a mask 7 made of a substance which shows second thermal conductivity and including at least one hole part 8 having a shape corresponding to the shape of the pattern. The hole part 8 contacts the bottom face of the support body 1. The ratio of the first conductivity to the second conductivity is≥2 or≤1/2 in the execution period (duration) of the method. The method includes processes of: depositing a solution containing a substance made to form the pattern on the upper surface, and evaporating the solution. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011129878(A) 申请公布日期 2011.06.30
申请号 JP20100219680 申请日期 2010.09.29
申请人 COMMISSARIAT A L&apos,ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 BENWADIH MOHAMED
分类号 H01L21/336;B81B7/02;B82B3/00;H01L21/027;H01L21/368;H01L29/786 主分类号 H01L21/336
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