发明名称 |
METHOD OF GENERATING LOCALIZED PATTERN |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of generating a simple and high-resolution localized pattern which is easy to implement. <P>SOLUTION: This method of generating at least one pattern on the upper surface of a support body 1 made of a substance showing first thermal conductivity includes a process of arranging a mask 7 made of a substance which shows second thermal conductivity and including at least one hole part 8 having a shape corresponding to the shape of the pattern. The hole part 8 contacts the bottom face of the support body 1. The ratio of the first conductivity to the second conductivity is≥2 or≤1/2 in the execution period (duration) of the method. The method includes processes of: depositing a solution containing a substance made to form the pattern on the upper surface, and evaporating the solution. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011129878(A) |
申请公布日期 |
2011.06.30 |
申请号 |
JP20100219680 |
申请日期 |
2010.09.29 |
申请人 |
COMMISSARIAT A L&apos,ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
BENWADIH MOHAMED |
分类号 |
H01L21/336;B81B7/02;B82B3/00;H01L21/027;H01L21/368;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|